3/9/2010	8:02:15 AM	Main Vac valve closed
3/9/2010	8:02:16 AM	Bypass valve closed
3/9/2010	8:02:28 AM	Bypass valve opened
3/9/2010	8:02:29 AM	Main Vac valve opened
3/9/2010	8:06:03 AM	Recipe started at 8:06 AM
3/9/2010	8:06:03 AM	Helium valve closed
3/9/2010	8:06:03 AM	BCl3 valve closed
3/9/2010	8:06:03 AM	PH3 valve closed
3/9/2010	8:06:03 AM	SiCl4 pre valve closed
3/9/2010	8:06:03 AM	SiCl4 post valve closed
3/9/2010	8:06:03 AM	Main Vac valve closed
3/9/2010	8:06:03 AM	Bypass valve closed
3/9/2010	8:06:03 AM	Bubbler valve closed
3/9/2010	8:06:03 AM	H2 valve opened
3/9/2010	8:06:03 AM	Helium MFC set to  0.000000
3/9/2010	8:06:03 AM	H2 MFC set to  500.000000
3/9/2010	8:06:03 AM	BCl3 MFC set to  0.000000
3/9/2010	8:06:03 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:06:03 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:06:03 AM	Tube furnace set to 0
3/9/2010	8:07:18 AM	Helium valve closed
3/9/2010	8:07:18 AM	BCl3 valve closed
3/9/2010	8:07:18 AM	PH3 valve closed
3/9/2010	8:07:18 AM	SiCl4 pre valve closed
3/9/2010	8:07:18 AM	SiCl4 post valve closed
3/9/2010	8:07:18 AM	Main Vac valve closed
3/9/2010	8:07:18 AM	Bypass valve closed
3/9/2010	8:07:18 AM	H2 valve opened
3/9/2010	8:07:18 AM	Bubbler valve opened
3/9/2010	8:07:18 AM	Helium MFC set to  0.000000
3/9/2010	8:07:18 AM	H2 MFC set to  500.000000
3/9/2010	8:07:18 AM	BCl3 MFC set to  0.000000
3/9/2010	8:07:18 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:07:18 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:07:18 AM	Tube furnace set to 0
3/9/2010	8:17:19 AM	Helium valve closed
3/9/2010	8:17:19 AM	BCl3 valve closed
3/9/2010	8:17:19 AM	PH3 valve closed
3/9/2010	8:17:19 AM	SiCl4 pre valve closed
3/9/2010	8:17:19 AM	SiCl4 post valve closed
3/9/2010	8:17:19 AM	Main Vac valve closed
3/9/2010	8:17:19 AM	Bypass valve closed
3/9/2010	8:17:19 AM	H2 valve opened
3/9/2010	8:17:19 AM	Bubbler valve opened
3/9/2010	8:17:19 AM	Helium MFC set to  0.000000
3/9/2010	8:17:19 AM	H2 MFC set to  500.000000
3/9/2010	8:17:19 AM	BCl3 MFC set to  0.000000
3/9/2010	8:17:19 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:17:19 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:17:19 AM	Tube furnace set to 0
3/9/2010	8:22:19 AM	H2 valve closed
3/9/2010	8:22:19 AM	BCl3 valve closed
3/9/2010	8:22:19 AM	PH3 valve closed
3/9/2010	8:22:19 AM	SiCl4 pre valve closed
3/9/2010	8:22:19 AM	SiCl4 post valve closed
3/9/2010	8:22:19 AM	Main Vac valve closed
3/9/2010	8:22:19 AM	Bypass valve closed
3/9/2010	8:22:19 AM	Helium valve opened
3/9/2010	8:22:19 AM	Bubbler valve opened
3/9/2010	8:22:19 AM	Helium MFC set to  500.000000
3/9/2010	8:22:19 AM	H2 MFC set to  0.000000
3/9/2010	8:22:19 AM	BCl3 MFC set to  0.000000
3/9/2010	8:22:19 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:22:19 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:22:19 AM	Tube furnace set to 0
3/9/2010	8:27:19 AM	Helium valve closed
3/9/2010	8:27:19 AM	H2 valve closed
3/9/2010	8:27:19 AM	BCl3 valve closed
3/9/2010	8:27:19 AM	PH3 valve closed
3/9/2010	8:27:19 AM	SiCl4 pre valve closed
3/9/2010	8:27:19 AM	SiCl4 post valve closed
3/9/2010	8:27:19 AM	Main Vac valve closed
3/9/2010	8:27:19 AM	Bypass valve closed
3/9/2010	8:27:19 AM	Bubbler valve closed
3/9/2010	8:27:19 AM	Helium MFC set to  0.000000
3/9/2010	8:27:19 AM	H2 MFC set to  0.000000
3/9/2010	8:27:19 AM	BCl3 MFC set to  0.000000
3/9/2010	8:27:19 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:27:19 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:27:19 AM	Tube furnace set to 0
3/9/2010	8:27:19 AM	Run finished at 8:27 AM
3/9/2010	8:28:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	8:28:39 AM	Recipe started at 8:28 AM
3/9/2010	8:28:39 AM	Helium valve closed
3/9/2010	8:28:39 AM	H2 valve closed
3/9/2010	8:28:39 AM	BCl3 valve closed
3/9/2010	8:28:39 AM	PH3 valve closed
3/9/2010	8:28:39 AM	SiCl4 pre valve closed
3/9/2010	8:28:39 AM	SiCl4 post valve closed
3/9/2010	8:28:39 AM	Main Vac valve closed
3/9/2010	8:28:39 AM	Bubbler valve closed
3/9/2010	8:28:39 AM	Bypass valve opened
3/9/2010	8:28:39 AM	Helium MFC set to  0.000000
3/9/2010	8:28:39 AM	H2 MFC set to  0.000000
3/9/2010	8:28:39 AM	BCl3 MFC set to  0.000000
3/9/2010	8:28:39 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:28:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:28:39 AM	Tube furnace set to 0
3/9/2010	8:28:57 AM	Helium valve closed
3/9/2010	8:28:57 AM	H2 valve closed
3/9/2010	8:28:57 AM	BCl3 valve closed
3/9/2010	8:28:57 AM	PH3 valve closed
3/9/2010	8:28:57 AM	SiCl4 pre valve closed
3/9/2010	8:28:57 AM	SiCl4 post valve closed
3/9/2010	8:28:57 AM	Bubbler valve closed
3/9/2010	8:28:57 AM	Main Vac valve opened
3/9/2010	8:28:57 AM	Bypass valve opened
3/9/2010	8:28:57 AM	Helium MFC set to  0.000000
3/9/2010	8:28:57 AM	H2 MFC set to  0.000000
3/9/2010	8:28:57 AM	BCl3 MFC set to  0.000000
3/9/2010	8:28:57 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:28:57 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:28:57 AM	Tube furnace set to 0
3/9/2010	8:28:57 AM	Run finished at 8:28 AM
3/9/2010	8:28:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	8:35:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	8:35:19 AM	Recipe started at 8:35 AM
3/9/2010	8:35:19 AM	H2 valve closed
3/9/2010	8:35:19 AM	BCl3 valve closed
3/9/2010	8:35:19 AM	PH3 valve closed
3/9/2010	8:35:19 AM	SiCl4 pre valve closed
3/9/2010	8:35:19 AM	SiCl4 post valve closed
3/9/2010	8:35:19 AM	Main Vac valve closed
3/9/2010	8:35:19 AM	Bypass valve closed
3/9/2010	8:35:19 AM	Bubbler valve closed
3/9/2010	8:35:19 AM	Helium valve opened
3/9/2010	8:35:19 AM	Helium MFC set to  500.000000
3/9/2010	8:35:19 AM	H2 MFC set to  0.000000
3/9/2010	8:35:19 AM	BCl3 MFC set to  0.000000
3/9/2010	8:35:19 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:35:19 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:35:19 AM	Tube furnace set to 0
3/9/2010	8:36:35 AM	Helium valve closed
3/9/2010	8:36:35 AM	H2 valve closed
3/9/2010	8:36:35 AM	BCl3 valve closed
3/9/2010	8:36:35 AM	PH3 valve closed
3/9/2010	8:36:35 AM	SiCl4 pre valve closed
3/9/2010	8:36:35 AM	SiCl4 post valve closed
3/9/2010	8:36:35 AM	Main Vac valve closed
3/9/2010	8:36:35 AM	Bypass valve closed
3/9/2010	8:36:35 AM	Bubbler valve closed
3/9/2010	8:36:35 AM	Helium MFC set to  0.000000
3/9/2010	8:36:35 AM	H2 MFC set to  0.000000
3/9/2010	8:36:35 AM	BCl3 MFC set to  0.000000
3/9/2010	8:36:35 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:36:35 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:36:35 AM	Tube furnace set to 0
3/9/2010	8:36:35 AM	Run finished at 8:36 AM
3/9/2010	8:36:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	8:40:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	8:40:46 AM	Recipe started at 8:40 AM
3/9/2010	8:40:46 AM	Helium valve closed
3/9/2010	8:40:46 AM	H2 valve closed
3/9/2010	8:40:46 AM	BCl3 valve closed
3/9/2010	8:40:46 AM	PH3 valve closed
3/9/2010	8:40:46 AM	SiCl4 pre valve closed
3/9/2010	8:40:46 AM	SiCl4 post valve closed
3/9/2010	8:40:46 AM	Main Vac valve closed
3/9/2010	8:40:46 AM	Bubbler valve closed
3/9/2010	8:40:46 AM	Bypass valve opened
3/9/2010	8:40:46 AM	Helium MFC set to  0.000000
3/9/2010	8:40:46 AM	H2 MFC set to  0.000000
3/9/2010	8:40:46 AM	BCl3 MFC set to  0.000000
3/9/2010	8:40:46 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:40:46 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:40:46 AM	Tube furnace set to 0
3/9/2010	8:41:14 AM	Helium valve closed
3/9/2010	8:41:14 AM	H2 valve closed
3/9/2010	8:41:14 AM	BCl3 valve closed
3/9/2010	8:41:14 AM	PH3 valve closed
3/9/2010	8:41:14 AM	SiCl4 pre valve closed
3/9/2010	8:41:14 AM	SiCl4 post valve closed
3/9/2010	8:41:14 AM	Bubbler valve closed
3/9/2010	8:41:14 AM	Main Vac valve opened
3/9/2010	8:41:14 AM	Bypass valve opened
3/9/2010	8:41:14 AM	Helium MFC set to  0.000000
3/9/2010	8:41:14 AM	H2 MFC set to  0.000000
3/9/2010	8:41:14 AM	BCl3 MFC set to  0.000000
3/9/2010	8:41:14 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:41:14 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:41:14 AM	Tube furnace set to 0
3/9/2010	8:41:15 AM	Run finished at 8:41 AM
3/9/2010	8:41:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	8:42:10 AM	Helium MFC set to  100.000000
3/9/2010	8:42:11 AM	Helium valve opened
3/9/2010	8:43:22 AM	Helium MFC set to  0.000000
3/9/2010	8:43:23 AM	Helium valve closed
3/9/2010	8:43:57 AM	Helium MFC set to  100.000000
3/9/2010	8:43:57 AM	Helium valve opened
3/9/2010	8:46:29 AM	Helium MFC set to  0.000000
3/9/2010	8:46:29 AM	Helium valve closed
3/9/2010	8:48:15 AM	Helium MFC set to  100.000000
3/9/2010	8:48:16 AM	Helium valve opened
3/9/2010	8:48:29 AM	Helium MFC set to  0.000000
3/9/2010	8:48:30 AM	Helium valve closed
3/9/2010	8:49:07 AM	Main Vac valve closed
3/9/2010	8:49:09 AM	Bypass valve closed
3/9/2010	8:49:21 AM	Bypass valve opened
3/9/2010	8:49:21 AM	Main Vac valve opened
3/9/2010	8:49:56 AM	Recipe started at 8:49 AM
3/9/2010	8:49:56 AM	Helium valve closed
3/9/2010	8:49:56 AM	BCl3 valve closed
3/9/2010	8:49:56 AM	PH3 valve closed
3/9/2010	8:49:56 AM	SiCl4 pre valve closed
3/9/2010	8:49:56 AM	SiCl4 post valve closed
3/9/2010	8:49:56 AM	Main Vac valve closed
3/9/2010	8:49:56 AM	Bypass valve closed
3/9/2010	8:49:56 AM	Bubbler valve closed
3/9/2010	8:49:56 AM	H2 valve opened
3/9/2010	8:49:56 AM	Helium MFC set to  0.000000
3/9/2010	8:49:56 AM	H2 MFC set to  500.000000
3/9/2010	8:49:56 AM	BCl3 MFC set to  0.000000
3/9/2010	8:49:56 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:49:56 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:49:56 AM	Tube furnace set to 0
3/9/2010	8:51:16 AM	Helium valve closed
3/9/2010	8:51:16 AM	BCl3 valve closed
3/9/2010	8:51:16 AM	PH3 valve closed
3/9/2010	8:51:16 AM	SiCl4 pre valve closed
3/9/2010	8:51:16 AM	SiCl4 post valve closed
3/9/2010	8:51:16 AM	Main Vac valve closed
3/9/2010	8:51:16 AM	Bypass valve closed
3/9/2010	8:51:16 AM	H2 valve opened
3/9/2010	8:51:16 AM	Bubbler valve opened
3/9/2010	8:51:16 AM	Helium MFC set to  0.000000
3/9/2010	8:51:16 AM	H2 MFC set to  500.000000
3/9/2010	8:51:16 AM	BCl3 MFC set to  0.000000
3/9/2010	8:51:16 AM	SiCl4 MFC set to  0.000000
3/9/2010	8:51:16 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	8:51:16 AM	Tube furnace set to 0
3/9/2010	9:11:17 AM	Helium valve closed
3/9/2010	9:11:17 AM	PH3 valve closed
3/9/2010	9:11:17 AM	Main Vac valve closed
3/9/2010	9:11:17 AM	Bypass valve closed
3/9/2010	9:11:17 AM	H2 valve opened
3/9/2010	9:11:17 AM	BCl3 valve opened
3/9/2010	9:11:17 AM	SiCl4 pre valve opened
3/9/2010	9:11:17 AM	SiCl4 post valve opened
3/9/2010	9:11:17 AM	Bubbler valve opened
3/9/2010	9:11:17 AM	Helium MFC set to  0.000000
3/9/2010	9:11:17 AM	H2 MFC set to  500.000000
3/9/2010	9:11:17 AM	BCl3 MFC set to  35.000000
3/9/2010	9:11:17 AM	SiCl4 MFC set to  325.000000
3/9/2010	9:11:17 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	9:11:17 AM	Tube furnace set to 0
3/9/2010	9:31:17 AM	Helium valve closed
3/9/2010	9:31:17 AM	BCl3 valve closed
3/9/2010	9:31:17 AM	PH3 valve closed
3/9/2010	9:31:17 AM	SiCl4 pre valve closed
3/9/2010	9:31:17 AM	SiCl4 post valve closed
3/9/2010	9:31:17 AM	Main Vac valve closed
3/9/2010	9:31:17 AM	Bypass valve closed
3/9/2010	9:31:17 AM	H2 valve opened
3/9/2010	9:31:17 AM	Bubbler valve opened
3/9/2010	9:31:17 AM	Helium MFC set to  0.000000
3/9/2010	9:31:17 AM	H2 MFC set to  500.000000
3/9/2010	9:31:17 AM	BCl3 MFC set to  0.000000
3/9/2010	9:31:17 AM	SiCl4 MFC set to  0.000000
3/9/2010	9:31:17 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	9:31:17 AM	Tube furnace set to 0
3/9/2010	9:51:17 AM	H2 valve closed
3/9/2010	9:51:17 AM	BCl3 valve closed
3/9/2010	9:51:17 AM	PH3 valve closed
3/9/2010	9:51:17 AM	SiCl4 pre valve closed
3/9/2010	9:51:17 AM	SiCl4 post valve closed
3/9/2010	9:51:17 AM	Main Vac valve closed
3/9/2010	9:51:17 AM	Bypass valve closed
3/9/2010	9:51:17 AM	Helium valve opened
3/9/2010	9:51:17 AM	Bubbler valve opened
3/9/2010	9:51:17 AM	Helium MFC set to  500.000000
3/9/2010	9:51:17 AM	H2 MFC set to  0.000000
3/9/2010	9:51:17 AM	BCl3 MFC set to  0.000000
3/9/2010	9:51:17 AM	SiCl4 MFC set to  0.000000
3/9/2010	9:51:17 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	9:51:17 AM	Tube furnace set to 0
3/9/2010	10:06:17 AM	Helium valve closed
3/9/2010	10:06:17 AM	H2 valve closed
3/9/2010	10:06:17 AM	BCl3 valve closed
3/9/2010	10:06:17 AM	PH3 valve closed
3/9/2010	10:06:17 AM	SiCl4 pre valve closed
3/9/2010	10:06:17 AM	SiCl4 post valve closed
3/9/2010	10:06:17 AM	Main Vac valve closed
3/9/2010	10:06:17 AM	Bypass valve closed
3/9/2010	10:06:17 AM	Bubbler valve closed
3/9/2010	10:06:17 AM	Helium MFC set to  0.000000
3/9/2010	10:06:17 AM	H2 MFC set to  0.000000
3/9/2010	10:06:17 AM	BCl3 MFC set to  0.000000
3/9/2010	10:06:17 AM	SiCl4 MFC set to  0.000000
3/9/2010	10:06:17 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	10:06:17 AM	Tube furnace set to 0
3/9/2010	10:06:18 AM	Run finished at 10:06 AM
3/9/2010	10:09:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	10:09:26 AM	Recipe started at 10:09 AM
3/9/2010	10:09:26 AM	Helium valve closed
3/9/2010	10:09:26 AM	H2 valve closed
3/9/2010	10:09:26 AM	BCl3 valve closed
3/9/2010	10:09:26 AM	PH3 valve closed
3/9/2010	10:09:26 AM	SiCl4 pre valve closed
3/9/2010	10:09:26 AM	SiCl4 post valve closed
3/9/2010	10:09:26 AM	Main Vac valve closed
3/9/2010	10:09:26 AM	Bubbler valve closed
3/9/2010	10:09:26 AM	Bypass valve opened
3/9/2010	10:09:26 AM	Helium MFC set to  0.000000
3/9/2010	10:09:26 AM	H2 MFC set to  0.000000
3/9/2010	10:09:26 AM	BCl3 MFC set to  0.000000
3/9/2010	10:09:26 AM	SiCl4 MFC set to  0.000000
3/9/2010	10:09:26 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	10:09:26 AM	Tube furnace set to 0
3/9/2010	10:09:56 AM	Helium valve closed
3/9/2010	10:09:56 AM	H2 valve closed
3/9/2010	10:09:56 AM	BCl3 valve closed
3/9/2010	10:09:56 AM	PH3 valve closed
3/9/2010	10:09:56 AM	SiCl4 pre valve closed
3/9/2010	10:09:56 AM	SiCl4 post valve closed
3/9/2010	10:09:56 AM	Bubbler valve closed
3/9/2010	10:09:56 AM	Main Vac valve opened
3/9/2010	10:09:56 AM	Bypass valve opened
3/9/2010	10:09:56 AM	Helium MFC set to  0.000000
3/9/2010	10:09:56 AM	H2 MFC set to  0.000000
3/9/2010	10:09:56 AM	BCl3 MFC set to  0.000000
3/9/2010	10:09:56 AM	SiCl4 MFC set to  0.000000
3/9/2010	10:09:56 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	10:09:56 AM	Tube furnace set to 0
3/9/2010	10:09:56 AM	Run finished at 10:09 AM
3/9/2010	10:09:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	10:11:44 AM	Helium MFC set to  100.000000
3/9/2010	10:11:45 AM	Helium valve opened
3/9/2010	10:14:24 AM	Helium MFC set to  0.000000
3/9/2010	10:14:25 AM	Helium valve closed
3/9/2010	10:15:19 AM	Helium MFC set to  100.000000
3/9/2010	10:15:19 AM	Helium valve opened
3/9/2010	10:16:45 AM	Helium MFC set to  0.000000
3/9/2010	10:16:46 AM	Helium valve closed
3/9/2010	10:22:26 AM	Helium MFC set to  100.000000
3/9/2010	10:22:27 AM	Helium valve opened
3/9/2010	10:24:22 AM	Helium MFC set to  0.000000
3/9/2010	10:24:22 AM	Helium valve closed
3/9/2010	10:24:59 AM	Main Vac valve closed
3/9/2010	10:25:00 AM	Bypass valve closed
3/9/2010	10:25:07 AM	Bypass valve opened
3/9/2010	10:25:08 AM	Main Vac valve opened
3/9/2010	10:26:24 AM	Recipe started at 10:26 AM
3/9/2010	10:26:24 AM	Helium valve closed
3/9/2010	10:26:24 AM	BCl3 valve closed
3/9/2010	10:26:24 AM	PH3 valve closed
3/9/2010	10:26:24 AM	SiCl4 pre valve closed
3/9/2010	10:26:24 AM	SiCl4 post valve closed
3/9/2010	10:26:24 AM	Main Vac valve closed
3/9/2010	10:26:24 AM	Bypass valve closed
3/9/2010	10:26:24 AM	Bubbler valve closed
3/9/2010	10:26:24 AM	H2 valve opened
3/9/2010	10:26:24 AM	Helium MFC set to  0.000000
3/9/2010	10:26:24 AM	H2 MFC set to  500.000000
3/9/2010	10:26:24 AM	BCl3 MFC set to  0.000000
3/9/2010	10:26:24 AM	SiCl4 MFC set to  0.000000
3/9/2010	10:26:24 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	10:26:24 AM	Tube furnace set to 0
3/9/2010	10:27:46 AM	Helium valve closed
3/9/2010	10:27:46 AM	BCl3 valve closed
3/9/2010	10:27:46 AM	PH3 valve closed
3/9/2010	10:27:46 AM	SiCl4 pre valve closed
3/9/2010	10:27:46 AM	SiCl4 post valve closed
3/9/2010	10:27:46 AM	Main Vac valve closed
3/9/2010	10:27:46 AM	Bypass valve closed
3/9/2010	10:27:46 AM	H2 valve opened
3/9/2010	10:27:46 AM	Bubbler valve opened
3/9/2010	10:27:46 AM	Helium MFC set to  0.000000
3/9/2010	10:27:46 AM	H2 MFC set to  500.000000
3/9/2010	10:27:46 AM	BCl3 MFC set to  0.000000
3/9/2010	10:27:46 AM	SiCl4 MFC set to  0.000000
3/9/2010	10:27:46 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	10:27:46 AM	Tube furnace set to 0
3/9/2010	10:47:46 AM	Helium valve closed
3/9/2010	10:47:46 AM	PH3 valve closed
3/9/2010	10:47:46 AM	Main Vac valve closed
3/9/2010	10:47:46 AM	Bypass valve closed
3/9/2010	10:47:46 AM	H2 valve opened
3/9/2010	10:47:46 AM	BCl3 valve opened
3/9/2010	10:47:46 AM	SiCl4 pre valve opened
3/9/2010	10:47:46 AM	SiCl4 post valve opened
3/9/2010	10:47:46 AM	Bubbler valve opened
3/9/2010	10:47:46 AM	Helium MFC set to  0.000000
3/9/2010	10:47:46 AM	H2 MFC set to  475.000000
3/9/2010	10:47:46 AM	BCl3 MFC set to  25.000000
3/9/2010	10:47:46 AM	SiCl4 MFC set to  325.000000
3/9/2010	10:47:46 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	10:47:46 AM	Tube furnace set to 0
3/9/2010	11:07:46 AM	Helium valve closed
3/9/2010	11:07:47 AM	BCl3 valve closed
3/9/2010	11:07:47 AM	PH3 valve closed
3/9/2010	11:07:47 AM	SiCl4 pre valve closed
3/9/2010	11:07:47 AM	SiCl4 post valve closed
3/9/2010	11:07:47 AM	Main Vac valve closed
3/9/2010	11:07:47 AM	Bypass valve closed
3/9/2010	11:07:47 AM	H2 valve opened
3/9/2010	11:07:47 AM	Bubbler valve opened
3/9/2010	11:07:47 AM	Helium MFC set to  0.000000
3/9/2010	11:07:47 AM	H2 MFC set to  500.000000
3/9/2010	11:07:47 AM	BCl3 MFC set to  0.000000
3/9/2010	11:07:47 AM	SiCl4 MFC set to  0.000000
3/9/2010	11:07:47 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	11:07:47 AM	Tube furnace set to 0
3/9/2010	11:27:47 AM	H2 valve closed
3/9/2010	11:27:47 AM	BCl3 valve closed
3/9/2010	11:27:47 AM	PH3 valve closed
3/9/2010	11:27:47 AM	SiCl4 pre valve closed
3/9/2010	11:27:47 AM	SiCl4 post valve closed
3/9/2010	11:27:47 AM	Main Vac valve closed
3/9/2010	11:27:47 AM	Bypass valve closed
3/9/2010	11:27:47 AM	Helium valve opened
3/9/2010	11:27:47 AM	Bubbler valve opened
3/9/2010	11:27:47 AM	Helium MFC set to  500.000000
3/9/2010	11:27:47 AM	H2 MFC set to  0.000000
3/9/2010	11:27:47 AM	BCl3 MFC set to  0.000000
3/9/2010	11:27:47 AM	SiCl4 MFC set to  0.000000
3/9/2010	11:27:47 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	11:27:47 AM	Tube furnace set to 0
3/9/2010	11:27:48 AM	Helium valve closed
3/9/2010	11:27:48 AM	H2 valve closed
3/9/2010	11:27:48 AM	BCl3 valve closed
3/9/2010	11:27:48 AM	PH3 valve closed
3/9/2010	11:27:48 AM	SiCl4 pre valve closed
3/9/2010	11:27:48 AM	SiCl4 post valve closed
3/9/2010	11:27:48 AM	Main Vac valve closed
3/9/2010	11:27:48 AM	Bypass valve closed
3/9/2010	11:27:48 AM	Bubbler valve closed
3/9/2010	11:27:48 AM	Helium MFC set to  0.000000
3/9/2010	11:27:48 AM	H2 MFC set to  0.000000
3/9/2010	11:27:48 AM	BCl3 MFC set to  0.000000
3/9/2010	11:27:48 AM	SiCl4 MFC set to  0.000000
3/9/2010	11:27:48 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	11:27:48 AM	Tube furnace set to 0
3/9/2010	11:27:48 AM	Run finished at 11:27 AM
3/9/2010	11:28:23 AM	Helium MFC set to  500.000000
3/9/2010	11:28:24 AM	Helium valve opened
3/9/2010	11:28:29 AM	Bubbler valve opened
3/9/2010	11:44:31 AM	Helium MFC set to  100.000000
3/9/2010	11:44:33 AM	Bubbler valve closed
3/9/2010	11:44:36 AM	Helium MFC set to  0.000000
3/9/2010	11:44:36 AM	Helium valve closed
3/9/2010	11:48:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	11:48:41 AM	Recipe started at 11:48 AM
3/9/2010	11:48:41 AM	Helium valve closed
3/9/2010	11:48:41 AM	H2 valve closed
3/9/2010	11:48:41 AM	BCl3 valve closed
3/9/2010	11:48:41 AM	PH3 valve closed
3/9/2010	11:48:41 AM	SiCl4 pre valve closed
3/9/2010	11:48:41 AM	SiCl4 post valve closed
3/9/2010	11:48:41 AM	Main Vac valve closed
3/9/2010	11:48:41 AM	Bubbler valve closed
3/9/2010	11:48:41 AM	Bypass valve opened
3/9/2010	11:48:41 AM	Helium MFC set to  0.000000
3/9/2010	11:48:41 AM	H2 MFC set to  0.000000
3/9/2010	11:48:41 AM	BCl3 MFC set to  0.000000
3/9/2010	11:48:41 AM	SiCl4 MFC set to  0.000000
3/9/2010	11:48:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	11:48:41 AM	Tube furnace set to 0
3/9/2010	11:49:12 AM	Helium valve closed
3/9/2010	11:49:12 AM	H2 valve closed
3/9/2010	11:49:12 AM	BCl3 valve closed
3/9/2010	11:49:12 AM	PH3 valve closed
3/9/2010	11:49:12 AM	SiCl4 pre valve closed
3/9/2010	11:49:12 AM	SiCl4 post valve closed
3/9/2010	11:49:12 AM	Bubbler valve closed
3/9/2010	11:49:12 AM	Main Vac valve opened
3/9/2010	11:49:12 AM	Bypass valve opened
3/9/2010	11:49:12 AM	Helium MFC set to  0.000000
3/9/2010	11:49:12 AM	H2 MFC set to  0.000000
3/9/2010	11:49:12 AM	BCl3 MFC set to  0.000000
3/9/2010	11:49:12 AM	SiCl4 MFC set to  0.000000
3/9/2010	11:49:12 AM	Bypass solenoid MFC set to  0.000000
3/9/2010	11:49:12 AM	Tube furnace set to 0
3/9/2010	11:49:12 AM	Run finished at 11:49 AM
3/9/2010	11:49:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	11:53:21 AM	Helium MFC set to  100.000000
3/9/2010	11:53:21 AM	Helium valve opened
3/9/2010	11:54:19 AM	Helium MFC set to  0.000000
3/9/2010	11:54:19 AM	Helium valve closed
3/9/2010	1:05:23 PM	Main Vac valve closed
3/9/2010	1:05:25 PM	Bypass valve closed
3/9/2010	1:05:37 PM	Bypass valve opened
3/9/2010	1:05:39 PM	Main Vac valve opened
3/9/2010	1:06:29 PM	Recipe started at 1:06 PM
3/9/2010	1:06:29 PM	Helium valve closed
3/9/2010	1:06:29 PM	BCl3 valve closed
3/9/2010	1:06:29 PM	PH3 valve closed
3/9/2010	1:06:29 PM	SiCl4 pre valve closed
3/9/2010	1:06:29 PM	SiCl4 post valve closed
3/9/2010	1:06:29 PM	Main Vac valve closed
3/9/2010	1:06:29 PM	Bypass valve closed
3/9/2010	1:06:29 PM	Bubbler valve closed
3/9/2010	1:06:29 PM	H2 valve opened
3/9/2010	1:06:29 PM	Helium MFC set to  0.000000
3/9/2010	1:06:29 PM	H2 MFC set to  500.000000
3/9/2010	1:06:29 PM	BCl3 MFC set to  0.000000
3/9/2010	1:06:29 PM	SiCl4 MFC set to  0.000000
3/9/2010	1:06:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	1:06:29 PM	Tube furnace set to 0
3/9/2010	1:07:48 PM	Helium valve closed
3/9/2010	1:07:48 PM	BCl3 valve closed
3/9/2010	1:07:48 PM	PH3 valve closed
3/9/2010	1:07:48 PM	SiCl4 pre valve closed
3/9/2010	1:07:48 PM	SiCl4 post valve closed
3/9/2010	1:07:48 PM	Main Vac valve closed
3/9/2010	1:07:48 PM	Bypass valve closed
3/9/2010	1:07:48 PM	H2 valve opened
3/9/2010	1:07:48 PM	Bubbler valve opened
3/9/2010	1:07:48 PM	Helium MFC set to  0.000000
3/9/2010	1:07:48 PM	H2 MFC set to  500.000000
3/9/2010	1:07:48 PM	BCl3 MFC set to  0.000000
3/9/2010	1:07:48 PM	SiCl4 MFC set to  0.000000
3/9/2010	1:07:48 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	1:07:48 PM	Tube furnace set to 0
3/9/2010	1:27:49 PM	Helium valve closed
3/9/2010	1:27:49 PM	PH3 valve closed
3/9/2010	1:27:49 PM	Main Vac valve closed
3/9/2010	1:27:49 PM	Bypass valve closed
3/9/2010	1:27:49 PM	H2 valve opened
3/9/2010	1:27:49 PM	BCl3 valve opened
3/9/2010	1:27:49 PM	SiCl4 pre valve opened
3/9/2010	1:27:49 PM	SiCl4 post valve opened
3/9/2010	1:27:49 PM	Bubbler valve opened
3/9/2010	1:27:49 PM	Helium MFC set to  0.000000
3/9/2010	1:27:49 PM	H2 MFC set to  475.000000
3/9/2010	1:27:49 PM	BCl3 MFC set to  25.000000
3/9/2010	1:27:49 PM	SiCl4 MFC set to  325.000000
3/9/2010	1:27:49 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	1:27:49 PM	Tube furnace set to 0
3/9/2010	1:47:49 PM	Helium valve closed
3/9/2010	1:47:49 PM	BCl3 valve closed
3/9/2010	1:47:49 PM	PH3 valve closed
3/9/2010	1:47:49 PM	SiCl4 pre valve closed
3/9/2010	1:47:49 PM	SiCl4 post valve closed
3/9/2010	1:47:49 PM	Main Vac valve closed
3/9/2010	1:47:49 PM	Bypass valve closed
3/9/2010	1:47:49 PM	H2 valve opened
3/9/2010	1:47:49 PM	Bubbler valve opened
3/9/2010	1:47:49 PM	Helium MFC set to  0.000000
3/9/2010	1:47:49 PM	H2 MFC set to  500.000000
3/9/2010	1:47:49 PM	BCl3 MFC set to  0.000000
3/9/2010	1:47:49 PM	SiCl4 MFC set to  0.000000
3/9/2010	1:47:49 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	1:47:49 PM	Tube furnace set to 0
3/9/2010	2:04:29 PM	H2 valve closed
3/9/2010	2:04:29 PM	BCl3 valve closed
3/9/2010	2:04:29 PM	PH3 valve closed
3/9/2010	2:04:29 PM	SiCl4 pre valve closed
3/9/2010	2:04:29 PM	SiCl4 post valve closed
3/9/2010	2:04:29 PM	Main Vac valve closed
3/9/2010	2:04:29 PM	Bypass valve closed
3/9/2010	2:04:29 PM	Helium valve opened
3/9/2010	2:04:29 PM	Bubbler valve opened
3/9/2010	2:04:29 PM	Helium MFC set to  500.000000
3/9/2010	2:04:29 PM	H2 MFC set to  0.000000
3/9/2010	2:04:29 PM	BCl3 MFC set to  0.000000
3/9/2010	2:04:29 PM	SiCl4 MFC set to  0.000000
3/9/2010	2:04:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	2:04:29 PM	Tube furnace set to 0
3/9/2010	2:19:29 PM	Helium valve closed
3/9/2010	2:19:29 PM	H2 valve closed
3/9/2010	2:19:29 PM	BCl3 valve closed
3/9/2010	2:19:29 PM	PH3 valve closed
3/9/2010	2:19:29 PM	SiCl4 pre valve closed
3/9/2010	2:19:29 PM	SiCl4 post valve closed
3/9/2010	2:19:29 PM	Main Vac valve closed
3/9/2010	2:19:29 PM	Bypass valve closed
3/9/2010	2:19:29 PM	Bubbler valve closed
3/9/2010	2:19:29 PM	Helium MFC set to  0.000000
3/9/2010	2:19:29 PM	H2 MFC set to  0.000000
3/9/2010	2:19:29 PM	BCl3 MFC set to  0.000000
3/9/2010	2:19:29 PM	SiCl4 MFC set to  0.000000
3/9/2010	2:19:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	2:19:29 PM	Tube furnace set to 0
3/9/2010	2:19:30 PM	Run finished at 2:19 PM
3/9/2010	2:23:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	2:23:22 PM	Recipe started at 2:23 PM
3/9/2010	2:23:22 PM	Helium valve closed
3/9/2010	2:23:22 PM	H2 valve closed
3/9/2010	2:23:22 PM	BCl3 valve closed
3/9/2010	2:23:22 PM	PH3 valve closed
3/9/2010	2:23:22 PM	SiCl4 pre valve closed
3/9/2010	2:23:22 PM	SiCl4 post valve closed
3/9/2010	2:23:22 PM	Main Vac valve closed
3/9/2010	2:23:22 PM	Bubbler valve closed
3/9/2010	2:23:22 PM	Bypass valve opened
3/9/2010	2:23:22 PM	Helium MFC set to  0.000000
3/9/2010	2:23:22 PM	H2 MFC set to  0.000000
3/9/2010	2:23:22 PM	BCl3 MFC set to  0.000000
3/9/2010	2:23:22 PM	SiCl4 MFC set to  0.000000
3/9/2010	2:23:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	2:23:22 PM	Tube furnace set to 0
3/9/2010	2:23:52 PM	Helium valve closed
3/9/2010	2:23:52 PM	H2 valve closed
3/9/2010	2:23:52 PM	BCl3 valve closed
3/9/2010	2:23:52 PM	PH3 valve closed
3/9/2010	2:23:52 PM	SiCl4 pre valve closed
3/9/2010	2:23:52 PM	SiCl4 post valve closed
3/9/2010	2:23:52 PM	Bubbler valve closed
3/9/2010	2:23:52 PM	Main Vac valve opened
3/9/2010	2:23:52 PM	Bypass valve opened
3/9/2010	2:23:52 PM	Helium MFC set to  0.000000
3/9/2010	2:23:52 PM	H2 MFC set to  0.000000
3/9/2010	2:23:52 PM	BCl3 MFC set to  0.000000
3/9/2010	2:23:52 PM	SiCl4 MFC set to  0.000000
3/9/2010	2:23:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	2:23:52 PM	Tube furnace set to 0
3/9/2010	2:23:52 PM	Run finished at 2:23 PM
3/9/2010	2:23:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:21:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:21:44 PM	Recipe started at 3:21 PM
3/9/2010	3:21:44 PM	H2 valve closed
3/9/2010	3:21:44 PM	BCl3 valve closed
3/9/2010	3:21:44 PM	PH3 valve closed
3/9/2010	3:21:44 PM	SiCl4 pre valve closed
3/9/2010	3:21:44 PM	SiCl4 post valve closed
3/9/2010	3:21:44 PM	Main Vac valve closed
3/9/2010	3:21:44 PM	Bypass valve closed
3/9/2010	3:21:44 PM	Bubbler valve closed
3/9/2010	3:21:44 PM	Helium valve opened
3/9/2010	3:21:44 PM	Helium MFC set to  500.000000
3/9/2010	3:21:44 PM	H2 MFC set to  0.000000
3/9/2010	3:21:44 PM	BCl3 MFC set to  0.000000
3/9/2010	3:21:44 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:21:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:21:44 PM	Tube furnace set to 0
3/9/2010	3:23:07 PM	Helium valve closed
3/9/2010	3:23:07 PM	H2 valve closed
3/9/2010	3:23:07 PM	BCl3 valve closed
3/9/2010	3:23:07 PM	PH3 valve closed
3/9/2010	3:23:07 PM	SiCl4 pre valve closed
3/9/2010	3:23:08 PM	SiCl4 post valve closed
3/9/2010	3:23:08 PM	Main Vac valve closed
3/9/2010	3:23:08 PM	Bypass valve closed
3/9/2010	3:23:08 PM	Bubbler valve closed
3/9/2010	3:23:08 PM	Helium MFC set to  0.000000
3/9/2010	3:23:08 PM	H2 MFC set to  0.000000
3/9/2010	3:23:08 PM	BCl3 MFC set to  0.000000
3/9/2010	3:23:08 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:23:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:23:08 PM	Tube furnace set to 0
3/9/2010	3:23:08 PM	Run finished at 3:23 PM
3/9/2010	3:23:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:25:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:25:46 PM	Recipe started at 3:25 PM
3/9/2010	3:25:46 PM	Helium valve closed
3/9/2010	3:25:46 PM	H2 valve closed
3/9/2010	3:25:46 PM	BCl3 valve closed
3/9/2010	3:25:46 PM	PH3 valve closed
3/9/2010	3:25:46 PM	SiCl4 pre valve closed
3/9/2010	3:25:46 PM	SiCl4 post valve closed
3/9/2010	3:25:46 PM	Main Vac valve closed
3/9/2010	3:25:46 PM	Bubbler valve closed
3/9/2010	3:25:46 PM	Bypass valve opened
3/9/2010	3:25:46 PM	Helium MFC set to  0.000000
3/9/2010	3:25:46 PM	H2 MFC set to  0.000000
3/9/2010	3:25:46 PM	BCl3 MFC set to  0.000000
3/9/2010	3:25:46 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:25:46 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:25:46 PM	Tube furnace set to 0
3/9/2010	3:26:16 PM	Helium valve closed
3/9/2010	3:26:16 PM	H2 valve closed
3/9/2010	3:26:16 PM	BCl3 valve closed
3/9/2010	3:26:16 PM	PH3 valve closed
3/9/2010	3:26:16 PM	SiCl4 pre valve closed
3/9/2010	3:26:16 PM	SiCl4 post valve closed
3/9/2010	3:26:16 PM	Bubbler valve closed
3/9/2010	3:26:16 PM	Main Vac valve opened
3/9/2010	3:26:16 PM	Bypass valve opened
3/9/2010	3:26:16 PM	Helium MFC set to  0.000000
3/9/2010	3:26:16 PM	H2 MFC set to  0.000000
3/9/2010	3:26:16 PM	BCl3 MFC set to  0.000000
3/9/2010	3:26:16 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:26:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:26:16 PM	Tube furnace set to 0
3/9/2010	3:26:16 PM	Run finished at 3:26 PM
3/9/2010	3:26:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:30:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:30:34 PM	Recipe started at 3:30 PM
3/9/2010	3:30:34 PM	H2 valve closed
3/9/2010	3:30:34 PM	BCl3 valve closed
3/9/2010	3:30:34 PM	PH3 valve closed
3/9/2010	3:30:34 PM	SiCl4 pre valve closed
3/9/2010	3:30:34 PM	SiCl4 post valve closed
3/9/2010	3:30:34 PM	Main Vac valve closed
3/9/2010	3:30:34 PM	Bypass valve closed
3/9/2010	3:30:34 PM	Bubbler valve closed
3/9/2010	3:30:34 PM	Helium valve opened
3/9/2010	3:30:34 PM	Helium MFC set to  500.000000
3/9/2010	3:30:34 PM	H2 MFC set to  0.000000
3/9/2010	3:30:34 PM	BCl3 MFC set to  0.000000
3/9/2010	3:30:34 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:30:34 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:30:34 PM	Tube furnace set to 0
3/9/2010	3:30:49 PM	Run aborted at 3:30 PM
3/9/2010	3:30:49 PM	Helium valve closed
3/9/2010	3:30:49 PM	H2 valve closed
3/9/2010	3:30:49 PM	BCl3 valve closed
3/9/2010	3:30:49 PM	PH3 valve closed
3/9/2010	3:30:49 PM	SiCl4 pre valve closed
3/9/2010	3:30:49 PM	SiCl4 post valve closed
3/9/2010	3:30:49 PM	Bypass valve closed
3/9/2010	3:30:49 PM	Main Vac valve closed
3/9/2010	3:30:49 PM	Bubbler valve closed
3/9/2010	3:30:49 PM	Helium MFC set to  0.000000
3/9/2010	3:30:49 PM	H2 MFC set to  0.000000
3/9/2010	3:30:49 PM	BCl3 MFC set to  0.000000
3/9/2010	3:30:49 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:30:49 PM	Tube furnace set to 0
3/9/2010	3:30:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:32:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:32:53 PM	Recipe started at 3:32 PM
3/9/2010	3:32:53 PM	Helium valve closed
3/9/2010	3:32:53 PM	H2 valve closed
3/9/2010	3:32:53 PM	BCl3 valve closed
3/9/2010	3:32:53 PM	PH3 valve closed
3/9/2010	3:32:53 PM	SiCl4 pre valve closed
3/9/2010	3:32:53 PM	SiCl4 post valve closed
3/9/2010	3:32:53 PM	Main Vac valve closed
3/9/2010	3:32:53 PM	Bubbler valve closed
3/9/2010	3:32:53 PM	Bypass valve opened
3/9/2010	3:32:53 PM	Helium MFC set to  0.000000
3/9/2010	3:32:53 PM	H2 MFC set to  0.000000
3/9/2010	3:32:53 PM	BCl3 MFC set to  0.000000
3/9/2010	3:32:53 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:32:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:32:53 PM	Tube furnace set to 0
3/9/2010	3:33:27 PM	Helium valve closed
3/9/2010	3:33:27 PM	H2 valve closed
3/9/2010	3:33:27 PM	BCl3 valve closed
3/9/2010	3:33:27 PM	PH3 valve closed
3/9/2010	3:33:27 PM	SiCl4 pre valve closed
3/9/2010	3:33:27 PM	SiCl4 post valve closed
3/9/2010	3:33:27 PM	Bubbler valve closed
3/9/2010	3:33:27 PM	Main Vac valve opened
3/9/2010	3:33:27 PM	Bypass valve opened
3/9/2010	3:33:27 PM	Helium MFC set to  0.000000
3/9/2010	3:33:27 PM	H2 MFC set to  0.000000
3/9/2010	3:33:27 PM	BCl3 MFC set to  0.000000
3/9/2010	3:33:27 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:33:27 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:33:27 PM	Tube furnace set to 0
3/9/2010	3:33:27 PM	Run finished at 3:33 PM
3/9/2010	3:33:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:36:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:36:01 PM	Recipe started at 3:36 PM
3/9/2010	3:36:01 PM	H2 valve closed
3/9/2010	3:36:01 PM	BCl3 valve closed
3/9/2010	3:36:01 PM	PH3 valve closed
3/9/2010	3:36:01 PM	SiCl4 pre valve closed
3/9/2010	3:36:01 PM	SiCl4 post valve closed
3/9/2010	3:36:01 PM	Main Vac valve closed
3/9/2010	3:36:01 PM	Bypass valve closed
3/9/2010	3:36:01 PM	Bubbler valve closed
3/9/2010	3:36:01 PM	Helium valve opened
3/9/2010	3:36:01 PM	Helium MFC set to  500.000000
3/9/2010	3:36:01 PM	H2 MFC set to  0.000000
3/9/2010	3:36:01 PM	BCl3 MFC set to  0.000000
3/9/2010	3:36:01 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:36:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:36:01 PM	Tube furnace set to 0
3/9/2010	3:37:22 PM	Helium valve closed
3/9/2010	3:37:22 PM	H2 valve closed
3/9/2010	3:37:22 PM	BCl3 valve closed
3/9/2010	3:37:22 PM	PH3 valve closed
3/9/2010	3:37:22 PM	SiCl4 pre valve closed
3/9/2010	3:37:22 PM	SiCl4 post valve closed
3/9/2010	3:37:22 PM	Main Vac valve closed
3/9/2010	3:37:22 PM	Bypass valve closed
3/9/2010	3:37:22 PM	Bubbler valve closed
3/9/2010	3:37:22 PM	Helium MFC set to  0.000000
3/9/2010	3:37:22 PM	H2 MFC set to  0.000000
3/9/2010	3:37:22 PM	BCl3 MFC set to  0.000000
3/9/2010	3:37:22 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:37:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:37:22 PM	Tube furnace set to 0
3/9/2010	3:37:22 PM	Run finished at 3:37 PM
3/9/2010	3:37:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:38:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:38:02 PM	Recipe started at 3:38 PM
3/9/2010	3:38:02 PM	Helium valve closed
3/9/2010	3:38:02 PM	H2 valve closed
3/9/2010	3:38:02 PM	BCl3 valve closed
3/9/2010	3:38:02 PM	PH3 valve closed
3/9/2010	3:38:02 PM	SiCl4 pre valve closed
3/9/2010	3:38:02 PM	SiCl4 post valve closed
3/9/2010	3:38:02 PM	Main Vac valve closed
3/9/2010	3:38:02 PM	Bubbler valve closed
3/9/2010	3:38:02 PM	Bypass valve opened
3/9/2010	3:38:02 PM	Helium MFC set to  0.000000
3/9/2010	3:38:02 PM	H2 MFC set to  0.000000
3/9/2010	3:38:02 PM	BCl3 MFC set to  0.000000
3/9/2010	3:38:02 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:38:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:38:02 PM	Tube furnace set to 0
3/9/2010	3:38:24 PM	Helium valve closed
3/9/2010	3:38:24 PM	H2 valve closed
3/9/2010	3:38:24 PM	BCl3 valve closed
3/9/2010	3:38:24 PM	PH3 valve closed
3/9/2010	3:38:24 PM	SiCl4 pre valve closed
3/9/2010	3:38:24 PM	SiCl4 post valve closed
3/9/2010	3:38:24 PM	Bubbler valve closed
3/9/2010	3:38:24 PM	Main Vac valve opened
3/9/2010	3:38:24 PM	Bypass valve opened
3/9/2010	3:38:24 PM	Helium MFC set to  0.000000
3/9/2010	3:38:24 PM	H2 MFC set to  0.000000
3/9/2010	3:38:24 PM	BCl3 MFC set to  0.000000
3/9/2010	3:38:24 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:38:24 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:38:24 PM	Tube furnace set to 0
3/9/2010	3:38:24 PM	Run finished at 3:38 PM
3/9/2010	3:38:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:39:43 PM	Bypass valve closed
3/9/2010	3:39:44 PM	Main Vac valve closed
3/9/2010	3:40:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:40:16 PM	Recipe started at 3:40 PM
3/9/2010	3:40:16 PM	H2 valve closed
3/9/2010	3:40:16 PM	BCl3 valve closed
3/9/2010	3:40:16 PM	PH3 valve closed
3/9/2010	3:40:16 PM	SiCl4 pre valve closed
3/9/2010	3:40:16 PM	SiCl4 post valve closed
3/9/2010	3:40:16 PM	Main Vac valve closed
3/9/2010	3:40:16 PM	Bypass valve closed
3/9/2010	3:40:16 PM	Bubbler valve closed
3/9/2010	3:40:16 PM	Helium valve opened
3/9/2010	3:40:16 PM	Helium MFC set to  500.000000
3/9/2010	3:40:16 PM	H2 MFC set to  0.000000
3/9/2010	3:40:16 PM	BCl3 MFC set to  0.000000
3/9/2010	3:40:16 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:40:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:40:16 PM	Tube furnace set to 0
3/9/2010	3:41:37 PM	Helium valve closed
3/9/2010	3:41:37 PM	H2 valve closed
3/9/2010	3:41:37 PM	BCl3 valve closed
3/9/2010	3:41:37 PM	PH3 valve closed
3/9/2010	3:41:37 PM	SiCl4 pre valve closed
3/9/2010	3:41:37 PM	SiCl4 post valve closed
3/9/2010	3:41:37 PM	Main Vac valve closed
3/9/2010	3:41:37 PM	Bypass valve closed
3/9/2010	3:41:37 PM	Bubbler valve closed
3/9/2010	3:41:37 PM	Helium MFC set to  0.000000
3/9/2010	3:41:37 PM	H2 MFC set to  0.000000
3/9/2010	3:41:37 PM	BCl3 MFC set to  0.000000
3/9/2010	3:41:37 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:41:37 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:41:37 PM	Tube furnace set to 0
3/9/2010	3:41:37 PM	Run finished at 3:41 PM
3/9/2010	3:41:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:42:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:42:27 PM	Recipe started at 3:42 PM
3/9/2010	3:42:27 PM	Helium valve closed
3/9/2010	3:42:27 PM	H2 valve closed
3/9/2010	3:42:27 PM	BCl3 valve closed
3/9/2010	3:42:27 PM	PH3 valve closed
3/9/2010	3:42:27 PM	SiCl4 pre valve closed
3/9/2010	3:42:27 PM	SiCl4 post valve closed
3/9/2010	3:42:27 PM	Main Vac valve closed
3/9/2010	3:42:27 PM	Bubbler valve closed
3/9/2010	3:42:27 PM	Bypass valve opened
3/9/2010	3:42:27 PM	Helium MFC set to  0.000000
3/9/2010	3:42:27 PM	H2 MFC set to  0.000000
3/9/2010	3:42:27 PM	BCl3 MFC set to  0.000000
3/9/2010	3:42:27 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:42:27 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:42:27 PM	Tube furnace set to 0
3/9/2010	3:42:49 PM	Helium valve closed
3/9/2010	3:42:49 PM	H2 valve closed
3/9/2010	3:42:49 PM	BCl3 valve closed
3/9/2010	3:42:49 PM	PH3 valve closed
3/9/2010	3:42:49 PM	SiCl4 pre valve closed
3/9/2010	3:42:49 PM	SiCl4 post valve closed
3/9/2010	3:42:49 PM	Bubbler valve closed
3/9/2010	3:42:49 PM	Main Vac valve opened
3/9/2010	3:42:49 PM	Bypass valve opened
3/9/2010	3:42:49 PM	Helium MFC set to  0.000000
3/9/2010	3:42:49 PM	H2 MFC set to  0.000000
3/9/2010	3:42:49 PM	BCl3 MFC set to  0.000000
3/9/2010	3:42:49 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:42:49 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:42:49 PM	Tube furnace set to 0
3/9/2010	3:42:49 PM	Run finished at 3:42 PM
3/9/2010	3:42:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:43:33 PM	Bypass valve closed
3/9/2010	3:43:33 PM	Main Vac valve closed
3/9/2010	3:43:43 PM	Main Vac valve opened
3/9/2010	3:43:44 PM	Bypass valve opened
3/9/2010	3:43:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:44:00 PM	Recipe started at 3:43 PM
3/9/2010	3:44:00 PM	H2 valve closed
3/9/2010	3:44:00 PM	BCl3 valve closed
3/9/2010	3:44:00 PM	PH3 valve closed
3/9/2010	3:44:00 PM	SiCl4 pre valve closed
3/9/2010	3:44:00 PM	SiCl4 post valve closed
3/9/2010	3:44:00 PM	Main Vac valve closed
3/9/2010	3:44:00 PM	Bypass valve closed
3/9/2010	3:44:00 PM	Bubbler valve closed
3/9/2010	3:44:01 PM	Helium valve opened
3/9/2010	3:44:01 PM	Helium MFC set to  500.000000
3/9/2010	3:44:01 PM	H2 MFC set to  0.000000
3/9/2010	3:44:01 PM	BCl3 MFC set to  0.000000
3/9/2010	3:44:01 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:44:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:44:01 PM	Tube furnace set to 0
3/9/2010	3:45:21 PM	Helium valve closed
3/9/2010	3:45:21 PM	H2 valve closed
3/9/2010	3:45:21 PM	BCl3 valve closed
3/9/2010	3:45:21 PM	PH3 valve closed
3/9/2010	3:45:21 PM	SiCl4 pre valve closed
3/9/2010	3:45:21 PM	SiCl4 post valve closed
3/9/2010	3:45:21 PM	Main Vac valve closed
3/9/2010	3:45:21 PM	Bypass valve closed
3/9/2010	3:45:21 PM	Bubbler valve closed
3/9/2010	3:45:21 PM	Helium MFC set to  0.000000
3/9/2010	3:45:21 PM	H2 MFC set to  0.000000
3/9/2010	3:45:21 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:21 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:21 PM	Tube furnace set to 0
3/9/2010	3:45:36 PM	Helium valve closed
3/9/2010	3:45:36 PM	H2 valve closed
3/9/2010	3:45:36 PM	BCl3 valve closed
3/9/2010	3:45:36 PM	PH3 valve closed
3/9/2010	3:45:36 PM	SiCl4 pre valve closed
3/9/2010	3:45:36 PM	SiCl4 post valve closed
3/9/2010	3:45:36 PM	Main Vac valve closed
3/9/2010	3:45:36 PM	Bubbler valve closed
3/9/2010	3:45:36 PM	Bypass valve opened
3/9/2010	3:45:36 PM	Helium MFC set to  0.000000
3/9/2010	3:45:36 PM	H2 MFC set to  0.000000
3/9/2010	3:45:36 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:36 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:36 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:36 PM	Tube furnace set to 0
3/9/2010	3:45:47 PM	Helium valve closed
3/9/2010	3:45:47 PM	H2 valve closed
3/9/2010	3:45:47 PM	BCl3 valve closed
3/9/2010	3:45:47 PM	PH3 valve closed
3/9/2010	3:45:47 PM	SiCl4 pre valve closed
3/9/2010	3:45:47 PM	SiCl4 post valve closed
3/9/2010	3:45:47 PM	Bubbler valve closed
3/9/2010	3:45:47 PM	Main Vac valve opened
3/9/2010	3:45:47 PM	Bypass valve opened
3/9/2010	3:45:47 PM	Helium MFC set to  0.000000
3/9/2010	3:45:47 PM	H2 MFC set to  0.000000
3/9/2010	3:45:47 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:47 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:47 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:47 PM	Tube furnace set to 0
3/9/2010	3:45:49 PM	H2 valve closed
3/9/2010	3:45:49 PM	BCl3 valve closed
3/9/2010	3:45:49 PM	PH3 valve closed
3/9/2010	3:45:49 PM	SiCl4 pre valve closed
3/9/2010	3:45:49 PM	SiCl4 post valve closed
3/9/2010	3:45:49 PM	Main Vac valve closed
3/9/2010	3:45:49 PM	Bypass valve closed
3/9/2010	3:45:49 PM	Bubbler valve closed
3/9/2010	3:45:49 PM	Helium valve opened
3/9/2010	3:45:49 PM	Helium MFC set to  500.000000
3/9/2010	3:45:49 PM	H2 MFC set to  0.000000
3/9/2010	3:45:49 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:49 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:49 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:49 PM	Tube furnace set to 0
3/9/2010	3:45:52 PM	Helium valve closed
3/9/2010	3:45:52 PM	H2 valve closed
3/9/2010	3:45:52 PM	BCl3 valve closed
3/9/2010	3:45:52 PM	PH3 valve closed
3/9/2010	3:45:52 PM	SiCl4 pre valve closed
3/9/2010	3:45:52 PM	SiCl4 post valve closed
3/9/2010	3:45:52 PM	Main Vac valve closed
3/9/2010	3:45:52 PM	Bypass valve closed
3/9/2010	3:45:52 PM	Bubbler valve closed
3/9/2010	3:45:52 PM	Helium MFC set to  0.000000
3/9/2010	3:45:52 PM	H2 MFC set to  0.000000
3/9/2010	3:45:52 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:52 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:52 PM	Tube furnace set to 0
3/9/2010	3:45:53 PM	Helium valve closed
3/9/2010	3:45:53 PM	H2 valve closed
3/9/2010	3:45:53 PM	BCl3 valve closed
3/9/2010	3:45:53 PM	PH3 valve closed
3/9/2010	3:45:53 PM	SiCl4 pre valve closed
3/9/2010	3:45:53 PM	SiCl4 post valve closed
3/9/2010	3:45:53 PM	Main Vac valve closed
3/9/2010	3:45:53 PM	Bubbler valve closed
3/9/2010	3:45:53 PM	Bypass valve opened
3/9/2010	3:45:53 PM	Helium MFC set to  0.000000
3/9/2010	3:45:53 PM	H2 MFC set to  0.000000
3/9/2010	3:45:53 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:53 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:53 PM	Tube furnace set to 0
3/9/2010	3:45:53 PM	Helium valve closed
3/9/2010	3:45:53 PM	H2 valve closed
3/9/2010	3:45:53 PM	BCl3 valve closed
3/9/2010	3:45:53 PM	PH3 valve closed
3/9/2010	3:45:53 PM	SiCl4 pre valve closed
3/9/2010	3:45:53 PM	SiCl4 post valve closed
3/9/2010	3:45:53 PM	Bubbler valve closed
3/9/2010	3:45:53 PM	Main Vac valve opened
3/9/2010	3:45:53 PM	Bypass valve opened
3/9/2010	3:45:53 PM	Helium MFC set to  0.000000
3/9/2010	3:45:53 PM	H2 MFC set to  0.000000
3/9/2010	3:45:53 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:53 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:53 PM	Tube furnace set to 0
3/9/2010	3:45:53 PM	H2 valve closed
3/9/2010	3:45:53 PM	BCl3 valve closed
3/9/2010	3:45:53 PM	PH3 valve closed
3/9/2010	3:45:53 PM	SiCl4 pre valve closed
3/9/2010	3:45:53 PM	SiCl4 post valve closed
3/9/2010	3:45:53 PM	Main Vac valve closed
3/9/2010	3:45:53 PM	Bypass valve closed
3/9/2010	3:45:53 PM	Bubbler valve closed
3/9/2010	3:45:53 PM	Helium valve opened
3/9/2010	3:45:53 PM	Helium MFC set to  500.000000
3/9/2010	3:45:53 PM	H2 MFC set to  0.000000
3/9/2010	3:45:53 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:53 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:53 PM	Tube furnace set to 0
3/9/2010	3:45:54 PM	Helium valve closed
3/9/2010	3:45:54 PM	H2 valve closed
3/9/2010	3:45:54 PM	BCl3 valve closed
3/9/2010	3:45:54 PM	PH3 valve closed
3/9/2010	3:45:54 PM	SiCl4 pre valve closed
3/9/2010	3:45:54 PM	SiCl4 post valve closed
3/9/2010	3:45:54 PM	Main Vac valve closed
3/9/2010	3:45:54 PM	Bypass valve closed
3/9/2010	3:45:54 PM	Bubbler valve closed
3/9/2010	3:45:54 PM	Helium MFC set to  0.000000
3/9/2010	3:45:54 PM	H2 MFC set to  0.000000
3/9/2010	3:45:54 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:54 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:45:54 PM	Tube furnace set to 0
3/9/2010	3:45:55 PM	Run aborted at 3:45 PM
3/9/2010	3:45:55 PM	Helium valve closed
3/9/2010	3:45:55 PM	H2 valve closed
3/9/2010	3:45:55 PM	BCl3 valve closed
3/9/2010	3:45:55 PM	PH3 valve closed
3/9/2010	3:45:55 PM	SiCl4 pre valve closed
3/9/2010	3:45:55 PM	SiCl4 post valve closed
3/9/2010	3:45:55 PM	Bypass valve closed
3/9/2010	3:45:55 PM	Main Vac valve closed
3/9/2010	3:45:55 PM	Bubbler valve closed
3/9/2010	3:45:55 PM	Helium MFC set to  0.000000
3/9/2010	3:45:55 PM	H2 MFC set to  0.000000
3/9/2010	3:45:55 PM	BCl3 MFC set to  0.000000
3/9/2010	3:45:55 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:45:55 PM	Tube furnace set to 0
3/9/2010	3:45:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:47:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:47:06 PM	Recipe started at 3:47 PM
3/9/2010	3:47:06 PM	H2 valve closed
3/9/2010	3:47:06 PM	BCl3 valve closed
3/9/2010	3:47:06 PM	PH3 valve closed
3/9/2010	3:47:06 PM	SiCl4 pre valve closed
3/9/2010	3:47:06 PM	SiCl4 post valve closed
3/9/2010	3:47:06 PM	Main Vac valve closed
3/9/2010	3:47:06 PM	Bypass valve closed
3/9/2010	3:47:06 PM	Bubbler valve closed
3/9/2010	3:47:06 PM	Helium valve opened
3/9/2010	3:47:06 PM	Helium MFC set to  500.000000
3/9/2010	3:47:06 PM	H2 MFC set to  0.000000
3/9/2010	3:47:06 PM	BCl3 MFC set to  0.000000
3/9/2010	3:47:06 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:47:06 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:47:06 PM	Tube furnace set to 0
3/9/2010	3:48:25 PM	Helium valve closed
3/9/2010	3:48:25 PM	H2 valve closed
3/9/2010	3:48:25 PM	BCl3 valve closed
3/9/2010	3:48:25 PM	PH3 valve closed
3/9/2010	3:48:25 PM	SiCl4 pre valve closed
3/9/2010	3:48:25 PM	SiCl4 post valve closed
3/9/2010	3:48:25 PM	Main Vac valve closed
3/9/2010	3:48:25 PM	Bypass valve closed
3/9/2010	3:48:25 PM	Bubbler valve closed
3/9/2010	3:48:25 PM	Helium MFC set to  0.000000
3/9/2010	3:48:25 PM	H2 MFC set to  0.000000
3/9/2010	3:48:25 PM	BCl3 MFC set to  0.000000
3/9/2010	3:48:25 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:48:25 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:48:25 PM	Tube furnace set to 0
3/9/2010	3:48:40 PM	Helium valve closed
3/9/2010	3:48:40 PM	H2 valve closed
3/9/2010	3:48:40 PM	BCl3 valve closed
3/9/2010	3:48:40 PM	PH3 valve closed
3/9/2010	3:48:40 PM	SiCl4 pre valve closed
3/9/2010	3:48:40 PM	SiCl4 post valve closed
3/9/2010	3:48:40 PM	Main Vac valve closed
3/9/2010	3:48:40 PM	Bubbler valve closed
3/9/2010	3:48:40 PM	Bypass valve opened
3/9/2010	3:48:40 PM	Helium MFC set to  0.000000
3/9/2010	3:48:40 PM	H2 MFC set to  0.000000
3/9/2010	3:48:40 PM	BCl3 MFC set to  0.000000
3/9/2010	3:48:40 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:48:40 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:48:40 PM	Tube furnace set to 0
3/9/2010	3:49:02 PM	Helium valve closed
3/9/2010	3:49:02 PM	H2 valve closed
3/9/2010	3:49:02 PM	BCl3 valve closed
3/9/2010	3:49:02 PM	PH3 valve closed
3/9/2010	3:49:02 PM	SiCl4 pre valve closed
3/9/2010	3:49:02 PM	SiCl4 post valve closed
3/9/2010	3:49:02 PM	Bubbler valve closed
3/9/2010	3:49:02 PM	Main Vac valve opened
3/9/2010	3:49:02 PM	Bypass valve opened
3/9/2010	3:49:02 PM	Helium MFC set to  0.000000
3/9/2010	3:49:02 PM	H2 MFC set to  0.000000
3/9/2010	3:49:02 PM	BCl3 MFC set to  0.000000
3/9/2010	3:49:02 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:49:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:49:02 PM	Tube furnace set to 0
3/9/2010	3:49:53 PM	H2 valve closed
3/9/2010	3:49:53 PM	BCl3 valve closed
3/9/2010	3:49:53 PM	PH3 valve closed
3/9/2010	3:49:53 PM	SiCl4 pre valve closed
3/9/2010	3:49:53 PM	SiCl4 post valve closed
3/9/2010	3:49:53 PM	Main Vac valve closed
3/9/2010	3:49:53 PM	Bypass valve closed
3/9/2010	3:49:53 PM	Bubbler valve closed
3/9/2010	3:49:53 PM	Helium valve opened
3/9/2010	3:49:53 PM	Helium MFC set to  500.000000
3/9/2010	3:49:53 PM	H2 MFC set to  0.000000
3/9/2010	3:49:53 PM	BCl3 MFC set to  0.000000
3/9/2010	3:49:53 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:49:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:49:53 PM	Tube furnace set to 0
3/9/2010	3:50:41 PM	Run aborted at 3:50 PM
3/9/2010	3:50:41 PM	Helium valve closed
3/9/2010	3:50:41 PM	H2 valve closed
3/9/2010	3:50:41 PM	BCl3 valve closed
3/9/2010	3:50:41 PM	PH3 valve closed
3/9/2010	3:50:41 PM	SiCl4 pre valve closed
3/9/2010	3:50:41 PM	SiCl4 post valve closed
3/9/2010	3:50:41 PM	Bypass valve closed
3/9/2010	3:50:41 PM	Main Vac valve closed
3/9/2010	3:50:41 PM	Bubbler valve closed
3/9/2010	3:50:41 PM	Helium MFC set to  0.000000
3/9/2010	3:50:41 PM	H2 MFC set to  0.000000
3/9/2010	3:50:41 PM	BCl3 MFC set to  0.000000
3/9/2010	3:50:41 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:50:41 PM	Tube furnace set to 0
3/9/2010	3:50:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:55:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:55:15 PM	Recipe started at 3:55 PM
3/9/2010	3:55:15 PM	Helium valve closed
3/9/2010	3:55:15 PM	H2 valve closed
3/9/2010	3:55:15 PM	BCl3 valve closed
3/9/2010	3:55:15 PM	PH3 valve closed
3/9/2010	3:55:15 PM	SiCl4 pre valve closed
3/9/2010	3:55:15 PM	SiCl4 post valve closed
3/9/2010	3:55:15 PM	Main Vac valve closed
3/9/2010	3:55:15 PM	Bubbler valve closed
3/9/2010	3:55:15 PM	Bypass valve opened
3/9/2010	3:55:15 PM	Helium MFC set to  0.000000
3/9/2010	3:55:15 PM	H2 MFC set to  0.000000
3/9/2010	3:55:15 PM	BCl3 MFC set to  0.000000
3/9/2010	3:55:15 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:55:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:55:15 PM	Tube furnace set to 0
3/9/2010	3:55:34 PM	Helium valve closed
3/9/2010	3:55:34 PM	H2 valve closed
3/9/2010	3:55:34 PM	BCl3 valve closed
3/9/2010	3:55:34 PM	PH3 valve closed
3/9/2010	3:55:34 PM	SiCl4 pre valve closed
3/9/2010	3:55:34 PM	SiCl4 post valve closed
3/9/2010	3:55:34 PM	Bubbler valve closed
3/9/2010	3:55:34 PM	Main Vac valve opened
3/9/2010	3:55:34 PM	Bypass valve opened
3/9/2010	3:55:34 PM	Helium MFC set to  0.000000
3/9/2010	3:55:34 PM	H2 MFC set to  0.000000
3/9/2010	3:55:34 PM	BCl3 MFC set to  0.000000
3/9/2010	3:55:34 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:55:34 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:55:34 PM	Tube furnace set to 0
3/9/2010	3:55:34 PM	Run finished at 3:55 PM
3/9/2010	3:55:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:56:31 PM	Program exited cleanly
3/9/2010	3:56:33 PM	Program started normally
3/9/2010	3:56:33 PM	Helium valve closed
3/9/2010	3:56:33 PM	H2 valve closed
3/9/2010	3:56:33 PM	BCl3 valve closed
3/9/2010	3:56:33 PM	PH3 valve closed
3/9/2010	3:56:33 PM	SiCl4 pre valve closed
3/9/2010	3:56:33 PM	SiCl4 post valve closed
3/9/2010	3:56:33 PM	Main Vac valve closed
3/9/2010	3:56:33 PM	Bypass valve closed
3/9/2010	3:56:33 PM	Bubbler valve closed
3/9/2010	3:56:33 PM	Helium MFC set to  0.000000
3/9/2010	3:56:33 PM	H2 MFC set to  0.000000
3/9/2010	3:56:33 PM	BCl3 MFC set to  0.000000
3/9/2010	3:56:33 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:56:33 PM	Bypass solenoid MFC set to  760.000000
3/9/2010	3:56:33 PM	Tube furnace set to 0
3/9/2010	3:56:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:56:41 PM	Recipe started at 3:56 PM
3/9/2010	3:56:41 PM	Helium valve closed
3/9/2010	3:56:41 PM	H2 valve closed
3/9/2010	3:56:41 PM	BCl3 valve closed
3/9/2010	3:56:41 PM	PH3 valve closed
3/9/2010	3:56:41 PM	SiCl4 pre valve closed
3/9/2010	3:56:41 PM	SiCl4 post valve closed
3/9/2010	3:56:41 PM	Main Vac valve closed
3/9/2010	3:56:41 PM	Bubbler valve closed
3/9/2010	3:56:41 PM	Bypass valve opened
3/9/2010	3:56:41 PM	Helium MFC set to  0.000000
3/9/2010	3:56:41 PM	H2 MFC set to  0.000000
3/9/2010	3:56:41 PM	BCl3 MFC set to  0.000000
3/9/2010	3:56:41 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:56:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:56:41 PM	Tube furnace set to 0
3/9/2010	3:56:41 PM	Helium valve closed
3/9/2010	3:56:41 PM	H2 valve closed
3/9/2010	3:56:41 PM	BCl3 valve closed
3/9/2010	3:56:41 PM	PH3 valve closed
3/9/2010	3:56:41 PM	SiCl4 pre valve closed
3/9/2010	3:56:41 PM	SiCl4 post valve closed
3/9/2010	3:56:41 PM	Bubbler valve closed
3/9/2010	3:56:41 PM	Main Vac valve opened
3/9/2010	3:56:41 PM	Bypass valve opened
3/9/2010	3:56:41 PM	Helium MFC set to  0.000000
3/9/2010	3:56:41 PM	H2 MFC set to  0.000000
3/9/2010	3:56:41 PM	BCl3 MFC set to  0.000000
3/9/2010	3:56:41 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:56:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:56:41 PM	Tube furnace set to 0
3/9/2010	3:56:42 PM	Run finished at 3:56 PM
3/9/2010	3:56:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	3:57:00 PM	Program exited cleanly
3/9/2010	3:57:02 PM	Program started normally
3/9/2010	3:57:02 PM	Helium valve closed
3/9/2010	3:57:02 PM	H2 valve closed
3/9/2010	3:57:02 PM	BCl3 valve closed
3/9/2010	3:57:02 PM	PH3 valve closed
3/9/2010	3:57:02 PM	SiCl4 pre valve closed
3/9/2010	3:57:02 PM	SiCl4 post valve closed
3/9/2010	3:57:02 PM	Main Vac valve closed
3/9/2010	3:57:02 PM	Bypass valve closed
3/9/2010	3:57:02 PM	Bubbler valve closed
3/9/2010	3:57:02 PM	Helium MFC set to  0.000000
3/9/2010	3:57:02 PM	H2 MFC set to  0.000000
3/9/2010	3:57:02 PM	BCl3 MFC set to  0.000000
3/9/2010	3:57:02 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:57:02 PM	Bypass solenoid MFC set to  760.000000
3/9/2010	3:57:02 PM	Tube furnace set to 0
3/9/2010	3:57:13 PM	Bypass valve opened
3/9/2010	3:57:14 PM	Main Vac valve opened
3/9/2010	3:59:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	3:59:46 PM	Recipe started at 3:59 PM
3/9/2010	3:59:46 PM	H2 valve closed
3/9/2010	3:59:46 PM	BCl3 valve closed
3/9/2010	3:59:46 PM	PH3 valve closed
3/9/2010	3:59:46 PM	SiCl4 pre valve closed
3/9/2010	3:59:46 PM	SiCl4 post valve closed
3/9/2010	3:59:46 PM	Main Vac valve closed
3/9/2010	3:59:46 PM	Bypass valve closed
3/9/2010	3:59:46 PM	Bubbler valve closed
3/9/2010	3:59:46 PM	Helium valve opened
3/9/2010	3:59:46 PM	Helium MFC set to  500.000000
3/9/2010	3:59:46 PM	H2 MFC set to  0.000000
3/9/2010	3:59:46 PM	BCl3 MFC set to  0.000000
3/9/2010	3:59:46 PM	SiCl4 MFC set to  0.000000
3/9/2010	3:59:46 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	3:59:46 PM	Tube furnace set to 0
3/9/2010	4:01:06 PM	Helium valve closed
3/9/2010	4:01:06 PM	H2 valve closed
3/9/2010	4:01:06 PM	BCl3 valve closed
3/9/2010	4:01:06 PM	PH3 valve closed
3/9/2010	4:01:06 PM	SiCl4 pre valve closed
3/9/2010	4:01:06 PM	SiCl4 post valve closed
3/9/2010	4:01:06 PM	Main Vac valve closed
3/9/2010	4:01:06 PM	Bypass valve closed
3/9/2010	4:01:06 PM	Bubbler valve closed
3/9/2010	4:01:06 PM	Helium MFC set to  0.000000
3/9/2010	4:01:06 PM	H2 MFC set to  0.000000
3/9/2010	4:01:06 PM	BCl3 MFC set to  0.000000
3/9/2010	4:01:06 PM	SiCl4 MFC set to  0.000000
3/9/2010	4:01:06 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	4:01:06 PM	Tube furnace set to 0
3/9/2010	4:01:07 PM	Run finished at 4:01 PM
3/9/2010	4:01:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2010	4:01:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	4:01:15 PM	Recipe started at 4:01 PM
3/9/2010	4:01:15 PM	Helium valve closed
3/9/2010	4:01:15 PM	H2 valve closed
3/9/2010	4:01:15 PM	BCl3 valve closed
3/9/2010	4:01:15 PM	PH3 valve closed
3/9/2010	4:01:15 PM	SiCl4 pre valve closed
3/9/2010	4:01:15 PM	SiCl4 post valve closed
3/9/2010	4:01:15 PM	Main Vac valve closed
3/9/2010	4:01:15 PM	Bubbler valve closed
3/9/2010	4:01:15 PM	Bypass valve opened
3/9/2010	4:01:15 PM	Helium MFC set to  0.000000
3/9/2010	4:01:15 PM	H2 MFC set to  0.000000
3/9/2010	4:01:15 PM	BCl3 MFC set to  0.000000
3/9/2010	4:01:15 PM	SiCl4 MFC set to  0.000000
3/9/2010	4:01:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	4:01:15 PM	Tube furnace set to 0
3/9/2010	4:01:37 PM	Helium valve closed
3/9/2010	4:01:37 PM	H2 valve closed
3/9/2010	4:01:37 PM	BCl3 valve closed
3/9/2010	4:01:37 PM	PH3 valve closed
3/9/2010	4:01:37 PM	SiCl4 pre valve closed
3/9/2010	4:01:37 PM	SiCl4 post valve closed
3/9/2010	4:01:37 PM	Bubbler valve closed
3/9/2010	4:01:37 PM	Main Vac valve opened
3/9/2010	4:01:37 PM	Bypass valve opened
3/9/2010	4:01:37 PM	Helium MFC set to  0.000000
3/9/2010	4:01:37 PM	H2 MFC set to  0.000000
3/9/2010	4:01:37 PM	BCl3 MFC set to  0.000000
3/9/2010	4:01:37 PM	SiCl4 MFC set to  0.000000
3/9/2010	4:01:37 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	4:01:37 PM	Tube furnace set to 0
3/9/2010	4:01:38 PM	Run finished at 4:01 PM
3/9/2010	4:01:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	5:58:09 PM	Bypass valve closed
3/9/2010	5:58:10 PM	Main Vac valve closed
3/9/2010	5:58:21 PM	Bypass valve opened
3/9/2010	5:58:22 PM	Main Vac valve opened
3/9/2010	6:02:08 PM	Recipe started at 6:02 PM
3/9/2010	6:02:08 PM	Helium valve closed
3/9/2010	6:02:08 PM	BCl3 valve closed
3/9/2010	6:02:08 PM	PH3 valve closed
3/9/2010	6:02:08 PM	SiCl4 pre valve closed
3/9/2010	6:02:08 PM	SiCl4 post valve closed
3/9/2010	6:02:08 PM	Main Vac valve closed
3/9/2010	6:02:08 PM	Bypass valve closed
3/9/2010	6:02:08 PM	Bubbler valve closed
3/9/2010	6:02:08 PM	H2 valve opened
3/9/2010	6:02:08 PM	Helium MFC set to  0.000000
3/9/2010	6:02:08 PM	H2 MFC set to  500.000000
3/9/2010	6:02:08 PM	BCl3 MFC set to  0.000000
3/9/2010	6:02:08 PM	SiCl4 MFC set to  0.000000
3/9/2010	6:02:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:02:08 PM	Tube furnace set to 0
3/9/2010	6:03:31 PM	Helium valve closed
3/9/2010	6:03:31 PM	BCl3 valve closed
3/9/2010	6:03:31 PM	PH3 valve closed
3/9/2010	6:03:31 PM	SiCl4 pre valve closed
3/9/2010	6:03:31 PM	SiCl4 post valve closed
3/9/2010	6:03:31 PM	Main Vac valve closed
3/9/2010	6:03:31 PM	Bypass valve closed
3/9/2010	6:03:31 PM	H2 valve opened
3/9/2010	6:03:31 PM	Bubbler valve opened
3/9/2010	6:03:31 PM	Helium MFC set to  0.000000
3/9/2010	6:03:31 PM	H2 MFC set to  500.000000
3/9/2010	6:03:31 PM	BCl3 MFC set to  0.000000
3/9/2010	6:03:31 PM	SiCl4 MFC set to  0.000000
3/9/2010	6:03:31 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:03:31 PM	Tube furnace set to 0
3/9/2010	6:11:37 PM	Helium valve closed
3/9/2010	6:11:37 PM	PH3 valve closed
3/9/2010	6:11:37 PM	Main Vac valve closed
3/9/2010	6:11:37 PM	Bypass valve closed
3/9/2010	6:11:37 PM	H2 valve opened
3/9/2010	6:11:37 PM	BCl3 valve opened
3/9/2010	6:11:37 PM	SiCl4 pre valve opened
3/9/2010	6:11:37 PM	SiCl4 post valve opened
3/9/2010	6:11:37 PM	Bubbler valve opened
3/9/2010	6:11:37 PM	Helium MFC set to  0.000000
3/9/2010	6:11:37 PM	H2 MFC set to  500.000000
3/9/2010	6:11:37 PM	BCl3 MFC set to  35.000000
3/9/2010	6:11:37 PM	SiCl4 MFC set to  325.000000
3/9/2010	6:11:37 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:11:37 PM	Tube furnace set to 0
3/9/2010	6:14:51 PM	Helium valve closed
3/9/2010	6:14:51 PM	PH3 valve closed
3/9/2010	6:14:51 PM	Main Vac valve closed
3/9/2010	6:14:51 PM	Bypass valve closed
3/9/2010	6:14:51 PM	H2 valve opened
3/9/2010	6:14:51 PM	BCl3 valve opened
3/9/2010	6:14:51 PM	SiCl4 pre valve opened
3/9/2010	6:14:51 PM	SiCl4 post valve opened
3/9/2010	6:14:51 PM	Bubbler valve opened
3/9/2010	6:14:51 PM	Helium MFC set to  0.000000
3/9/2010	6:14:51 PM	H2 MFC set to  500.000000
3/9/2010	6:14:51 PM	BCl3 MFC set to  35.000000
3/9/2010	6:14:51 PM	SiCl4 MFC set to  325.000000
3/9/2010	6:14:51 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:14:51 PM	Tube furnace set to 0
3/9/2010	6:19:52 PM	H2 valve closed
3/9/2010	6:19:52 PM	BCl3 valve closed
3/9/2010	6:19:52 PM	PH3 valve closed
3/9/2010	6:19:52 PM	SiCl4 pre valve closed
3/9/2010	6:19:52 PM	SiCl4 post valve closed
3/9/2010	6:19:52 PM	Main Vac valve closed
3/9/2010	6:19:52 PM	Bypass valve closed
3/9/2010	6:19:52 PM	Helium valve opened
3/9/2010	6:19:52 PM	Bubbler valve opened
3/9/2010	6:19:52 PM	Helium MFC set to  500.000000
3/9/2010	6:19:52 PM	H2 MFC set to  0.000000
3/9/2010	6:19:52 PM	BCl3 MFC set to  0.000000
3/9/2010	6:19:52 PM	SiCl4 MFC set to  0.000000
3/9/2010	6:19:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:19:52 PM	Tube furnace set to 0
3/9/2010	6:39:52 PM	Helium valve closed
3/9/2010	6:39:52 PM	H2 valve closed
3/9/2010	6:39:52 PM	BCl3 valve closed
3/9/2010	6:39:52 PM	PH3 valve closed
3/9/2010	6:39:52 PM	SiCl4 pre valve closed
3/9/2010	6:39:52 PM	SiCl4 post valve closed
3/9/2010	6:39:52 PM	Main Vac valve closed
3/9/2010	6:39:52 PM	Bypass valve closed
3/9/2010	6:39:52 PM	Bubbler valve closed
3/9/2010	6:39:52 PM	Helium MFC set to  0.000000
3/9/2010	6:39:52 PM	H2 MFC set to  0.000000
3/9/2010	6:39:52 PM	BCl3 MFC set to  0.000000
3/9/2010	6:39:52 PM	SiCl4 MFC set to  0.000000
3/9/2010	6:39:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:39:52 PM	Tube furnace set to 0
3/9/2010	6:39:52 PM	Run finished at 6:39 PM
3/9/2010	6:59:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2010	6:59:22 PM	Recipe started at 6:59 PM
3/9/2010	6:59:22 PM	Helium valve closed
3/9/2010	6:59:22 PM	H2 valve closed
3/9/2010	6:59:22 PM	BCl3 valve closed
3/9/2010	6:59:22 PM	PH3 valve closed
3/9/2010	6:59:22 PM	SiCl4 pre valve closed
3/9/2010	6:59:22 PM	SiCl4 post valve closed
3/9/2010	6:59:22 PM	Main Vac valve closed
3/9/2010	6:59:22 PM	Bubbler valve closed
3/9/2010	6:59:22 PM	Bypass valve opened
3/9/2010	6:59:22 PM	Helium MFC set to  0.000000
3/9/2010	6:59:22 PM	H2 MFC set to  0.000000
3/9/2010	6:59:22 PM	BCl3 MFC set to  0.000000
3/9/2010	6:59:22 PM	SiCl4 MFC set to  0.000000
3/9/2010	6:59:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:59:22 PM	Tube furnace set to 0
3/9/2010	6:59:52 PM	Helium valve closed
3/9/2010	6:59:52 PM	H2 valve closed
3/9/2010	6:59:52 PM	BCl3 valve closed
3/9/2010	6:59:52 PM	PH3 valve closed
3/9/2010	6:59:52 PM	SiCl4 pre valve closed
3/9/2010	6:59:52 PM	SiCl4 post valve closed
3/9/2010	6:59:52 PM	Bubbler valve closed
3/9/2010	6:59:52 PM	Main Vac valve opened
3/9/2010	6:59:52 PM	Bypass valve opened
3/9/2010	6:59:52 PM	Helium MFC set to  0.000000
3/9/2010	6:59:52 PM	H2 MFC set to  0.000000
3/9/2010	6:59:52 PM	BCl3 MFC set to  0.000000
3/9/2010	6:59:52 PM	SiCl4 MFC set to  0.000000
3/9/2010	6:59:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2010	6:59:52 PM	Tube furnace set to 0
3/9/2010	6:59:53 PM	Run finished at 6:59 PM
3/9/2010	6:59:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
